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Marke: SUSS MicroTec
Manufacturer
SUSS
Model
MicroTec Gamma
Year of Manufacture
2010
CE Marked
Yes
Electrical Specifications
Voltage
400V
3-phase +N+PE
Power
22 kVA
AIC
100 kA / 400V
FLC
32 A
Pneumatic Requirements
CDA (Clean Dry Air)
Nitrogen (N₂)
Vacuum (VAC)
Deionized Water (DIW)
System Overview
High-performance automated coater/developer system designed for semiconductor and MEMS processing. Ideal for 4" to 8" wafers
Wafer Size
4-fold I/O for 4"–8" wafers
Software
Version 4.41c(23)
Operating System
Windows XP Professional
Version 2002
Service Pack 3
Processor
2.0 GHz
Memory
500 MB RAM
Configuration
4-fold I/O
with Sankio double gripper
2 Developer Modules
(1 medium size)
1 Coating Module
(2 lacquers
IDI)
7 Hot Plates (HP)
2 Chill Plates (CP)
1 Flood Exposure Unit
Mechanical Centering
Media Cabinet
Control Cabinet
4x Julabo Temperature Controllers
Find more here
https://www.ucymachines.com/
Contact us at
sales@ucymachines.com